New Software Specs

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Below is the Software Requirements Specification used to develop the new software.

1.0 Overview:

Between 1984 and 2004 dozens of “Fullflow” and “Omni” semiconductor processing tools were sold to dozens of semiconductor manufacturers by CFM Technologies, Mattson Technology, and SCP Global Technologies. These tools were all controlled by uncommon hardware and custom, hardware-specific software. Today, replacement hardware is nearly impossible to find, the software is very difficult to support, and tool owners are facing the possible end-of-life of these otherwise satisfactory systems.
 

Truitt Engineering is developing a replacement control system that will offer these tool owners a new choice. For a fraction of the cost of a new tool, the package offered by Truitt Engineering will replace the obsoleted hardware and software components while also adding new functionality to the tools and giving them a path to new life.
 

This document serves to define the functionality, features, and benefits of the upgrade package. The new control system is guaranteed to perform only as explicitly described here. Additional functionality may also be provided, but, functionality not explicitly described here is implicitly not included in version 7.0.

2.0 Features and Benefits:

 

FEATURES BENEFITS
Off-the-Shelf PC Hardware – The software system shall not use any custom, hardware-specific components. Upon failure of any component of the PC, including the CPU, hard drive, touch screen, or other input devices, the failed component shall be replaceable with components easily obtained from multiple hardware vendors.
Off-the-Shelf Operating System – The software system shall not use any operating system-specific components. It shall be possible to run the software on multiple operating systems including Windows 2000, Windows XP, and Windows Vista.
Off-the-Shelf Software Components – The software components shall be based upon the Iconics Genesis 32 software system and other software modules available from third-party vendors. The core software components will have been proven by thousands of users in thousands of applications. This provides the greatest number of features with the fewest bugs at the lowest cost.
Stand-alone Recipe Maintenance Tool owners will be able to develop recipes at the tool or at their desks.
Full Recipe Download Once a recipe has started, it will not stop as a result of unexpected use or failure of the PC. In version 4, the recipe would stop at the end of a step if the PC was no longer running the Omni software.
Enhanced Tube Utilities In addition to single-tube injections, tool owners will be able to inject combinations of multiple tubes in tube utilities.
SECS/GEM with HSMS Tool owners will now have the option to connect the plant host to the tool via Ethernet instead of RS-232.

 

3.0 Compatibility:

3.1 Compatible Systems and Sub-Systems:

  • Single-Vessel Systems

  • Dual-Vessel Systems

  • 6050 Systems

  • 6100 Systems

  • 8050 Systems

  • 8100 Systems

  • IPA Modules with Recovery

  • IPA Modules without Recovery

  • Quad-Inject Modules (all types)

  • Dual-Inject Modules (all types)

  • Pumping Modules (H2SO4 and KOH)

  • Queuing Automation Modules

  • SMIF Modules with Parallel Communications (Asyst)

  • Ozone Modules

  • Ozonated Water Modules

3.2 Incompatible Systems and Sub-Systems:

  • FPD Systems

  • SMIF Modules with Serial Communications (Jenoptik)

  • Transfer Modules

  • Solvent Modules

3.3 Systems and Sub-Systems Requiring Upgrades for Compatibility:

  • Non-Queuing Automation Modules

 

4.0 Functional Comparison with V4:

4.1 Engineering Screen – This functionality will be provided in two parts. P&ID screens for each hardware module will show the current status of each module and provide access to its module parameters. A “Run Status” screen will allow the user to select, start, monitor, jump, hold, and abort a recipe.

4.2 Operator Screen – This functionality will not be DIRECTLY provided. Instead, the user will be able to close the P&ID screens while a recipe is in progress so that only the “Run Status” screen is visible. This creates the equivalent to the operator screen from version 4.

4.3 Idle System – This functionality will not be DIRECTLY provided. The user can use the built-in Windows screen saver to achieve the same results.


4.4 SECSII Utilities – This functionality will be provided by a third-party software supplier. The look and feel of this component will be determined by them.
 

4.5 Module Parameters – This functionality will be provided. Access to the Module Parameter screens will be through the P&ID screens for each module.

4.6 Recipe Maintenance – This functionality will be provided and enhanced. Recipe Maintenance will be performed with a separate stand-alone program that can be run on the tool or on a separate PC.

4.7 Data Analysis – Comparable functionality will be provided using Iconics TrendWorx. The look and feel will be very different and the methods to achieve certain results will vary. In some ways the new software will be easier to use and in other ways it will be harder to use. Certain pre-configured trends will be provided, making some tasks easier. Custom trends will be slightly more difficult to configure. Zooming procedures will be different and vertical scaling will be more adjustable. The final form will be determined more by the capabilities of Iconics Trendworx than anything else.

4.8 Recipe Selection – This functionality will be provided on the “Run Status” screen.
 

4.9 General Utilities – This is simply a button to access a sub-menu. There is no need to provide this functionality directly since navigation in version 7.0 (Windows) will be quite different from navigation in version 4 (DOS).
 

4.9.1 Local / Remote – This functionality will not be provided. It is recommended that the user purchase a separate PC for core maintenance, if desired. However, if a user insists on connecting two keyboards and two touch screens to a single PC, it can be accomplished using off-the-shelf KVM switches of the user’s choosing.
 

4.9.2 Calibrate Screen – If a touch screen is provided, this functionality will be provided with the software utilities that are generally included in the touch screen package. No additional functionality will be provided above and beyond the utilities that are provided by the touch screen manufacturer.

4.9.3 Modify Password – This functionality will not be DIRECTLY replaced. Instead, a comprehensive security system will be provided that includes individual user log-ins and passwords.
 

4.9.4 Clean Screen – If a touch screen is provided, this functionality will be provided with the software utilities that are generally included in the touch screen package. No additional functionality will be provided above and beyond the utilities that are provided by the touch screen manufacturer.
 

4.9.5 Emulate – A check box on a password-protected “Software Configuration” screen will allow the user to enable and disable the Emulation mode.
 

4.9.6 Access Mode – This functionality will not be DIRECTLY replaced. Instead, a comprehensive security system will be provided that includes individual user log-ins and passwords. Access to certain screens will be restricted to certain individuals.
 

4.9.7 Exit to Dos – This functionality is not really needed since the new system will run on multi-tasking operating systems where it is not necessary to leave the Omni software to run other programs. However, it will be possible to shut down the Omni software by the standard means by which any Windows program can be shut down.
 

4.9.8 Emulator Password – This functionality will not be DIRECTLY replaced. Emulation will be started and stopped through the “Software Configuration” screen that will be password protected as part of a comprehensive security strategy that will limit access to certain screens to certain individuals.
 

4.9.9 Define Sounds – This functionality will not be provided. Fixed sound patterns for existing buzzers MAY be included in Version 7.0, but, users should expect that the tools will be silent with the exception of any sound effects provided by Windows and configured by the tool owners.
 

4.9.10 Clear Vessel – A check box on a password-protected “Hardware Configuration” screen will allow the user to enable and disable the Clear Carrier mode.
 

4.10 System Diagnostics – This is simply a button to access a sub-menu. There is no need to provide this functionality directly since navigation in version 7.0 (Windows) will be quite different from navigation in version 4 (DOS).
 

4.10.1 PLC Programs – This functionality will not be provided in Version 7.0. Instead, tool owners are urged to purchase a copy of RS-Logix 5 from Allen Bradley. One copy can serve multiple tools at a single site and provides diagnostic capabilities far above and beyond what was available in version 4.
 

4.10.2 PLC Registers – This functionality will not be provided in Version 7.0. Instead, tool owners are urged to purchase a copy of RS-Logix 5 from Allen Bradley. One copy can serve multiple tools at a single site and provides diagnostic capabilities far above and beyond what was available in version 4.
 

4.10.3 Communications Diagnostics – This functionality will not be provided since there will be no VME-based communications. All communications between the PC and PLC will be done via Ethernet and Allen Bradley Data Highway Plus. Many tools for Ethernet diagnostics are built into the Windows operating system and DH+ diagnostic tools are available from Allen Bradley and other vendors.
 

4.10.4 Software Information – This functionality will be provided.
 

4.10.5 Last HF Data – This functionality will be provided, but, in a different form. Last HF Data will be stored in a Microsoft Access database and a screen will be provided for viewing the data.
 

4.10.6 DI Flow Utility – This functionality will not be provided in version 7.0.
 

4.10.7 SMIF Transports – This functionality will not be replaced since serial SMIFs (Jenoptik) will not be supported.

4.10.8 Data Log – In this version, the data log will be limited to alarms, interlocks, and a handful of other major events to be determined by Truitt Engineering.
 

4.10.9 Hardware Interlocks – This functionality will not be replaced.

4.10.10 Alarm Configuration – This functionality is not expected to be included in version 7.0.

4.10.11 Linear Arm – This functionality will not be exactly duplicated. The linear arm will be configured through Windows Hyperterminal per the manufacturer’s instructions. A procedure will be developed and distributed with the XPedition software to help users calibrate their linear arms using Hyperterminal.
 

4.10.12 Reset Run Number – A button on a password-protected “Hardware Configuration” screen will allow the user to reset the current run number.
 

4.11 APC – This functionality will be provided and enhanced. It will be moved from the PC to the PLC to guarantee that APC corrections take place regardless of the state of the PC.
 

4.12 Tube Utilities – This functionality will be fully provided and enhanced. As in version 4, users will be able to inject any single tube from any starting level to any stopping level as many times as desired. Also, users will be able to inject combinations of tubes in the same fashion.
 

4.13 SECS/GEM – This functionality will be provided and enhanced. The SECS/GEM standard will be implemented for the Omni tool as specified in the CFM Technologies SECS/GEM Interface manual dated 9/29/1997. In addition to the serial (SECS I) interface supported by V4, Ethernet (HSMS) will also be supported. The configuration interface will be as provided by a third-party software supplier.
 

4.14 Module Parameter Range Checking – This functionality is not expected to be included in version 7.0.

4.15 Alarms – This functionality will be provided. Alarms will be generated and logged using Iconics Alarmworx. An alarm viewer will be provided on the Run Status screen and possibly other screens. However, the alarm viewer on the Run Status screen is the only one that is guaranteed to be provided with this version.
 

4.16 Interlocks – This functionality will be provided. Interlocks will be generated and logged using Iconics Alarmworx. An interlock viewer will be provided on the Run Status screen and module P&ID screens.

4.17 Lot IDs – This functionality will be provided with a different look and feel.

 

5.0 Pricing:


Quotes provided by request only.  We need details of your systems to quote it properly.

 

Send mail to bhoxie@uabmfg.com with questions or comments about this web site.